Nanofabrication Facility
The New York Tech Nanofabrication Facility is a small scale user facility supporting nanoscale science and technology projects for students and researchers.
The facility, which began operation in 2015, centers on a 200 sq. ft. clean room equipped for device fabrication and characterization.
We welcome researchers from all disciplines wishing to explore uses of micro- and nanofabrication.
Safety
Handling with hazardous materials requires a combination of common sense and specific knowledge of the potential hazards, proper handling procedures, and use of safety equipment. Members of the staff are equipped to give training on lab safety procedures and to give you access to specific information on particular chemicals.
- Emergency Response Protocols
- Emergency Contacts
- Material Safety Data Sheet
- Clean Room Rules and Safety Manual
- Word about HF and First Aid for HF Exposure
Clean Room Access Protocol
In order to gain access to the Clean Room equipment and facilities, please complete all of the steps below:
- Take the Environmental Health and Safety Training Class.
- Upon completion of the class, send your class certificate to David Fanning at dfanni01@nyit.edu.
- Review the Clean Room Rules and Safety Manual.
- Contact David Fanning at dfanni01@nyit.edu or Fang Li at fli08@nyit.edu to begin training with them on Equipment, Processes, Rules, and Safety within the Clean Room Environment. NOTE: You must complete the steps above before you will be allowed to enter the clean room, and then only when accompanied by Staff.
- Once you have completed your training, you will be able to access to the Clean Room and work with some of the equipment, including the fumed hood and oven.
- To gain access to the majority of the Clean Room Equipment, you will need additional training and certification on that specific piece of equipment. For equipment certification information, contact the appropriate “super user” listed below, or contact the clean room staff.
Equipment
| Name | Catalog | Super users |
|---|---|---|
| Chemical Hood | Facility | Jon Furniss |
| Brewer Science Cee 200X spin coater | Lithography | Jon Furniss GopiPrasad Marne |
| Brewer Science Cee 1300X bake plate | Lithography | Jon Furniss GopiPrasad Marne |
| VWR 1465 vacuum oven | Lithography | Jon Furniss |
| NT-MDT Nano-Solver Atomic Force Microscope | Metrology | Jon Furniss |
| Alpha-step D-1o0 Surface Profilometer | Metrology | Jon Furniss GopiPrasad Marne |
| AJA DC/RF sputtering system | Thin film deposition | GopiPrasad Marne |
Rates
| Name | Hourly Rate | Minimum Hours | Maximum Hours |
|---|---|---|---|
| NT-MDT Nano-Solver Atomic Force Microscope | $25 | 0.75 | 3 |
| AJA DC/RF sputtering system | $30 | 2 | 5 |
| Alpha-step D-100 Surface Profilometer | $15 | 0.5 | 2 |
| Brewer Science Cee 200X spin coater | $15 | 0.25 | 1 |
Hours of operation
Monday–Friday: 9 a.m. – 6 p.m.
Location
NYIT-Long Island
College of Engineering and Computing Sciences
Harry Schure Hall
Contact Us
David Fanning 516.686.1001 dfanni01@nyit.edu
Fang Li 516.686.1062 fli08@nyit.edu